Chapter 4 – OPCODES

Temperature Value Atmosphere Value Option Value

ALARM

N/A N/A User Alarm Number

The alarm function (referred to as a User Alarm) is used to notify the operator that an operation is complete or that a manual action is required. An alarm must be acknowledged at the touch screen interface or Configurator prior to the recipe advancing to the next step.

If Programmer Alarm Text has been defined for the User Alarms, the custom text will appear in place of the User Alarm number on the recipe display screen. See Configuration section.

By use of the touch screen’s Menu -> Configuration -> Programmer Alarm Text feature, the Operator can assign specific text to any alarm. The custom text will appear on the touch screen’s recipe viewer to notify the Operator of what is to occur. For example, “End of Cycle” or “Furnace Ready to Quench”

It is important to note that defining Alarm Text at the touch screen will not assign the same text to Configurator. This must be accomplished by entering custom text in Configurator’s Settings-> select Manage Controller -> Alarm Text

User Alarm 0 is used to turn off a user alarm. Its function is the same as the acknowledge button and should not be used for normal operation requiring an Operator to acknowledge the alarm.

A User Alarm can be assigned to a relay as a PROGRAMMER ALARM (see Relay Assignments) to energize a relay. This relay may be used to enunciate an alarm horn, turn on a stack light, etc.

BRANCH

True Step Number False Step Number N/A

The Branch opcode can change program flow based upon an inquiry opcode. The True Step Number is the program step to go to if the inquiry is evaluated as true; and the False Step Number is the program step to go to if the inquiry is evaluated as false. This opcode should be placed in the step immediately following the inquiry step.

The True Step Number ranges from 1 – 24.

The False Step Number ranges from 1 – 24.

DELAY

N/A N/A Delay Time

This opcode is used when a short delay is needed. The Delay Time is in seconds, from 1 - 500 seconds.

DEV_AL

Temperature Dev/Band N/A Loop

The deviation alarm opcode is used to define a deviation value and turn the temperature deviation alarms ON or OFF. The Temperature Band will define the allowable deviation band from set point.

The Temperature Band ranges from -301 (Disable) – 30000 and represents the same units used to define the Loop 1 parameter.

The Loop options are on or off.

(Note: 9220 controllers do not support Atmosphere deviation bands and thus should not be used):

The Smart Temp alarm appears as a check box on the recipe editor (this option appears in Configurator, but not the touch screen). When selected, the alarm will not become active until the Temperature comes within the defined band, then leaves the band.

For example, an Opcode of:

DEV_AL 15°F * On Smart Alarm = OFF

will activate a deviation alarm anytime the Furnace Temperature PV differs from Temperature SP by more than +/-15°F. With a SP of 1900°F, the alarm will be active anytime the Furnace Temperature PV is less than 1885°F or greater than 1915°F.

However, if the Smart Alarm is turned ON, the alarm will not become active until the Furnace Temperature PV has reached 1886-1914°F. From that point, the alarm will only become active should it leave the band.

The temperature band/deviation limit can also be changed by the SET_WAIT opcode.

DOW_INQ

N/A N/A Day

This opcode checks the real time clock for the day of the week. The time and date must be correct on the 9220 controller – the screen time and date will not be used. An DOW_INQ must be true prior to advancing to the next step within the recipe.

This is useful for performing operations on a weekly basis on a specific day—for example, automatically turning a furnace heating on/off before someone comes in on Monday.

The Day is the day of the week, i.e. Sunday, Monday, Tuesday, Wednesday, Thursday, Friday, or Saturday.

EVT_IN

Temperature Setpoint N/A Event

This opcode waits for an input event to be turned ON or OFF depending on the Event value selected.

If the Temperature Setpoint is specified, it is considered a set point and will be sent to the appropriate controller.

The Temperature Setpoint ranges from -301 (Disable) – 30000.

The Event options are: Event 0 ON/OFF – Event 47 ON/OFF.

If Event Text has been defined for the Event Inputs, the custom text will appear in place of the Event Input number. See Configuration section.

By use of the touch screens Menu -> Configuration Event Text feature, the Operator can assign specific text to any event. The custom text will appear on the touch screen’s recipe viewer to notify the Operator of what is to occur. For example, “Vacuum Acceptable” or “Furnace Ready to Quench”.

It is important to note that defining Event Text at the touch screen will not assign the same text to Configurator. This must be accomplished by entering custom text in Configurator’s Settings -> select Manage Controller -> Input Event Descriptions.

EVT_OUT

Temperature Setpoint N/A Event

This opcode waits for an output event to be turned ON or OFF depending on the Event value selected.

If the Temperature Setpoint is specified, it is considered a set point and will be sent to the appropriate controller.

The Temperature Setpoint ranges from -301 (Disable) – 30000.

The Event options are: Event 0 ON/OFF – Event 47 ON/OFF.

If Event Text has been defined for the Event Outputs, the custom text will appear in place of the Event Output number. See Configuration section.

An Event Output can be assigned to a relay as an EVENT (see Relay Assignments section) to energize a relay. This relay may be used to enunciate an alarm horn, turn on a stack light, etc.

G_SOAK

N/A Wait Limit Soak Time

This is a guaranteed soak opcode. The temperature process value must be within the deviation band to allow the soak timer to run. If the temperature process value goes out of the deviation band, then the soak timer will stop and wait until the temperature process value comes back into the deviation band before starting up again.

By default, the defined DEFAULT WAIT LIMITS (see sections on Default Wait Limits) will be used as the +/- band. If a SET_WAIT Opcode has been used during the current recipe, those values will become active.

If Load TCs are DISABLED (see sections on Load T/C Configuration or Opcode LTC_SET), the Control TC is the only TC considered to count against the Soak Timer.

If Load TCs are ENABLED (see sections on Load T/C Configuration or Opcode LTC_SET), the Control TC and any selected Load TCs are considered to count against the Soak Timer.

If any enabled TCs are out of band, text will appear on the touch screen indicating “Recipe Holding for Load T/Cs”.

The Wait Limit is the wait time, in Hours: Minutes format. This is the duration of time the recipe will wait before alarming if the process value goes out of band. The Hours range from 0 – 533, and the Minutes range from 0 – 59. While the alarm is active, a Programmer Alarm can be assigned to specific relay (see sections on Relay Assignments) to enunciate an alarm horn or stack light.

The Soak time is the total time, in Hours:Minutes format, for the soak to run. The Hours range from 0 – 166, and the Minutes range from 0 – 59.

GDELAY

N/A N/A Delay Time

This opcode is a guaranteed short delay. With respect to which Control and Load TCs are considered, this Opcode behaves the same as a G_SOAK Opcode. The time is expressed in seconds, not hours & minutes.

The Delay Time is from 1 – 500 seconds.

GHDELAY

N/A N/A Delay Time

This opcode is a guaranteed high short delay opcode. With respect to which Control and Load TCs are considered, this Opcode behaves the same as a G_SOAK Opcode. The time is expressed in seconds, not hours & minutes. The temperature process value must be below the high limit deviation band to allow the delay timer to run. If the temperature process value goes out of the deviation band, then the delay timer will stop and wait until the temperature process value comes back into the deviation band before starting up again.

The Delay Time is from 1 – 500 seconds.

By default, the defined DEFAULT WAIT LIMITS (see section XXX) will be used as the +/- band. If a SET_WAIT Opcode has been used during the current recipe, those values will become active.

GHSOAK

N/A Wait Limit Soak Time

This is a guaranteed soak high opcode. With respect to which Control and Load TCs are considered, this Opcode behaves the same as a G_SOAK Opcode. The temperature process value must be below the high limit deviation band to allow the delay timer to run. If the temperature process value goes out of the deviation band, then the soak timer will stop and wait until the temperature process value comes back into the deviation band before starting up again.

The Soak time is the total time, in Hours:Minutes format, for the soak to run. The Hours range from 0 – 166, and the Minutes range from 0 – 59.

GHZDELAY

N/A N/A Delay Time

This is a guaranteed high short delay opcode for a zone. With respect to which Control and Load TCs are considered, this Opcode behaves the same as a G_SOAK Opcode. The time is expressed in seconds, not hours & minutes. The temperature process value must be below the high limit deviation band to allow the delay timer to run. If the temperature process value goes out of the deviation band, then the delay timer will stop and wait until the temperature process value comes back into the deviation band before starting up again.

The Delay Time is from 1 – 500 seconds.

GHZSOAK

N/A Wait Limit Soak Time

This is a guaranteed soak high opcode for a zone. With respect to which Control and Load TCs are considered, this Opcode behaves the same as a G_SOAK Opcode. The temperature process value must be below the high limit deviation band to allow the soak timer to run. If the temperature process value goes out of the deviation band, then the soak timer will stop and wait until the temperature process value comes back into the deviation band before starting up again.

The Soak time is the total time, in Hours:Minutes format, for the soak to run. The Hours range from 0 – 166, and the Minutes range from 0 – 59.

The band limit can be changed by the SET_WAIT opcode.

GLDELAY

N/A N/A Delay Time

This opcode is a guaranteed low short delay opcode. With respect to which Control and Load TCs are considered, this Opcode behaves the same as a G_SOAK Opcode. The time is expressed in seconds, not hours & minutes. The temperature process value must be above the lower limit deviation band to allow the delay timer to run. If the temperature process value goes out of the deviation band, then the delay timer will stop and wait until the temperature process value comes back into the deviation band before starting up again.

The Delay Time is from 1 – 500 seconds.

GLSOAK

N/A Wait Limit Soak Time

This is a guaranteed soak low opcode. With respect to which Control and Load TCs are considered, this Opcode behaves the same as a G_SOAK Opcode. The temperature process value must be above the lower limit deviation band to allow the soak timer to run. If the temperature process value goes out of the deviation band, then the soak timer will stop and wait until the temperature process value comes back into the deviation band before starting up again.

The Soak time is the total time, in Hours:Minutes format, for the soak to run. The Hours range from 0 – 166, and the Minutes range from 0 – 59.

GLZDELAY

N/A N/A Delay Time

This is a guaranteed low short delay opcode for a zone. With respect to which Control and Load TCs are considered, this Opcode behaves the same as a G_SOAK Opcode. The time is expressed in seconds, not hours & minutes. The temperature process value must be above the lower limit deviation band to allow the soak timer to run. If the temperature process value goes out of the deviation band, then the delay timer will stop and wait until the temperature process value comes back into the deviation band before starting up again.

The Delay Time is from 1 – 500 seconds.

GLZSOAK

N/A Wait Limit Soak Time

This is a guaranteed soak low opcode for a zone. With respect to which Control and Load TCs are considered, this Opcode behaves the same as a G_SOAK Opcode. The temperature process value must be above the lower limit deviation band to allow the soak timer to run. If the temperature process value goes out of the deviation band, then the soak timer will stop and wait until the temperature process value comes back into the deviation band before starting up again.

The Soak time is the total time, in Hours:Minutes format, for the soak to run. The Hours range from 0 – 166, and the Minutes range from 0 – 59.

GOSUB

N/A N/A Recipe Number

The go to subroutine opcode is used to call a program to run and then return to the calling program. This is used to execute standard routines that can be used by many programs. GOSUBs can be stacked up to eight (8) levels.

The difference between a JUMP and a GOSUB is that GOSUB will return to the original program when the called program completes. A JUMP will not return to the original program.

The Recipe Number is the recipe (program) to run. The range is 1 – 300.

GRAMP

Temperature Setpoint N/A Time

This is a guaranteed ramp opcode. With respect to which Control and Load TCs are considered, this Opcode behaves the same as a G_SOAK Opcode. The process value must be within the deviation band to allow the ramp timer to run. If the process value goes out of the deviation band, then the ramp timer will stop, holding at the current temperature SP until the process value comes back into the deviation band before starting up again.

The Temperature Setpoint is the setpoint to send for the temperature process variable. The range is -301 (disable) – 30000.

The Time is the total time for the program to reach the desired setpoint(s), in Hours:Minutes format. The Hours range from 0 – 166, and the Minutes range from 0 – 59.

default, the defined DEFAULT WAIT LIMITS (see section XXX) will be used as the +/- band. If a SET_WAIT Opcode has been used during the current recipe, those values will become active.

GRAMPR

Temperature Setpoint Option Decimal Rate

This is a guaranteed ramp opcode at a rate of degrees per minute. With respect to which Control and Load TCs are considered, this Opcode behaves the same as a G_SOAK Opcode. The process value must be within the deviation band to allow the ramp timer to run. If the process value goes out of the deviation band, then the ramp timer will stop, holding at the current temperature SP until the process value comes back into the deviation band before starting up again.

The Temperature Setpoint is the setpoint to send for the temperature process variable. The range is -301 (disable) – 30000.

The Option Decimal will alter the decimal point in the rate. The range is -1 (disable) – 2.

The Rate will be the rate of degrees per minute to change the temperature until the setpoint is reached. The range is 0.01 – 300.00.

GTCINQDEL

Delay Time T/C Option

This is a guaranteed TC inquiry short delay opcode. It is used to verify that the selected TC (note: only one TC may be selected) is within the set wait limits around the setpoint for the user defined time period.

The Delay Time is the time in seconds the selected TC must be within band before moving to the next step in the recipe. The range is 0 – 500.

The T/C is the Control T/C or Load T/C to use. The options are: Control T/C, T/C 1 – T/C 24

The Option will allow the user to wait for the T/Cs to come within the set wait limits around the setpoint. The options are: Wait, Wait Up, or Wait Down.

Wait: The timer waits until the selected T/C is within the +/- deviation from SP
Wait Up: The timer waits until the selected T/C is above the lower deviation limit
Wait Down: The timer waits until the selected T/C is below the upper deviation limit

GZ_SOAK

N/A N/A Soak Time

This is a guaranteed soak opcode for a zone. The temperature process value must be within the deviation band to allow the soak timer to run. If the temperature process value goes out of the deviation band, then the soak timer will stop and wait until the temperature process value comes back into the deviation band before starting up again.

The Soak time is the total time, in Hours:Minutes format, for the soak to run. The Hours range from 0 – 166, and the Minutes range from 0 – 59.

The band limit can be changed by the SET_WAIT opcode.

GZ_SOAKSB

N/A N/A Soak Time

This is a guaranteed soak opcode for a zone with the set point bump feature enabled, which are explained under the Zone/Load TC Setup menu in the Configurator Section. The temperature process value must be within the deviation band to allow the soak timer to run. If the temperature process value goes out of the deviation band, then the soak timer will stop and wait until the temperature process value comes back into the deviation band before starting up again.

NOTE: To adjust the control T/C a zone must be configured to define it. To do this, go to the Zone Assignments menu, set the Zone 1 Temperature Source to Loop 1 and the Temp Zone Number to 1.

GZDELAY

N/A N/A Delay Time

This is a guaranteed short delay opcode for a zone. The temperature process value must be within the deviation band to allow the delay timer to run. If the temperature process value goes out of the deviation band, then the soak timer will stop and wait until the temperature process value comes back into the deviation band before starting up again.

The Delay Time is from 1 – 500 seconds.

GZRAMP

Temperature Setpoint N/A Time

This is a guaranteed ramp opcode for a zone. The process value must be within the deviation band to allow the ramp timer to run. If the temperature process value goes out of the deviation band, then the ramp timer will stop and wait until the temperature process value comes back into the deviation band before starting up again.

The Temperature Setpoint is the setpoint to send for the temperature process variable. The range is -301 (disable) – 30000.

GZRAMPR

Temperature Setpoint Option Decimal Rate

This is a guaranteed ramp opcode for a zone at a rate of degrees per minute. The process value must be within the deviation band to allow the ramp timer to run. If the temperature process value goes out of the deviation band, then the ramp timer will stop and wait until the temperature process value comes back into the deviation band before starting up again.

The Temperature Setpoint is the setpoint to send for the temperature process variable. The range is -301 (disable) – 30000.

The Option Decimal will alter the decimal point in the rate. The range is -1 (disable) – 2.

The Rate will be the rate of degrees per minute to change the temperature until the setpoint is reached. The range is 0.01 – 300.00.

HIGH_AL

Temperature Setpoint N/A N/A

This opcode is used to enable a high limit alarm should the Control TC exceed a defined temperature. This Opcode can be placed at any location within the recipe and remains active until the program ends. If the Control TC exceeds this temperature, text will appear on the touch screen indicating “High Temperature”. This may be helpful in brazing cycles where it is possibly damaging for parts to exceed a certain temperature.

While the alarm is active, a Programmer Alarm can be assigned to a specific relay (see sections on Relay Assignments) to enunciate an alarm horn or stack light.

The Temperature Setpoint is the setpoint to send for the temperature process variable. The range is -301 (disable) – 30000.

Both the text and alarm remains active until the program ends.

HIGH_PO

Temperature PO Value N/A N/A

This opcode is used to enable a high limit alarm should on the temperature percent output exceed a defined maximum. This Opcode can be placed at any location within the recipe and remains active until the program ends. If the Temperature Percent Output exceeds this value, text will appear on the touch screen indicating “High Temperature % Output”. This may be helpful during times of Peak Demand when trying to reduce electrical consumption.

While the alarm is active, a Programmer Alarm can be assigned to a specific relay (see sections on Relay Assignments) to enunciate an alarm horn or stack light.

The Temperature PO Value is the high limit point for the temperature percent output. The range is -101 (disable) – 100.

Both the text and alarm remain active until the program ends.

ID_INC

N/A N/A N/A

This opcode increments the integer ID number by one. This Opcode can be used with ID_INQ and ID_SET to repeat defined sequences or help with Load Tracking. Refer to opcode ID_INQ for a specific example.

ID_INQ

ID Number Value N/A Option

This opcode is used to compare the ID value to the value in the temperature data. The LIMIT opcode immediately following this opcode sets a time limit on the wait. A BRANCH opcode immediately following this opcode can be used to change the program flow based on the inquiry results.

The ID Number Value is the ID to compare. The range is -301 (disable) – 30000.

The Option will determine how to compare the ID value against the value in the temperature data. The options are: Equal, High, or Low.

This Opcode, coupled with ID_INC and ID_SET can be helpful when wanting to repeat a defined sequence for a certain number of cycles. For example:

ID_SET 0 N/A N/A
ID_INC N/A N/A N/A
SOAK N/A N/A 0:45
ID_INQ 10 N/A EQUALS
BRANCH 6 2 N/A
SOAK N/A N/A 0:30

The above Opcodes will repeat steps 2-5 ten times. On the tenth time, the recipe will advance to step 6 and continue. This sequence could be useful when trying to evacuate & backfill a chamber multiple times prior to heating.

ID_SET

ID Number Value N/A N/A

This opcode is used to set the ID number to the value specified in the temperature data. The ID number is provided as a feature to track loads or jobs, and it is not used by any controller.

This Opcode can be used with ID_INC and ID_INQ to repeat defined sequences or help with Load Tracking. Refer to ID_INQ for a specific example.

The ID Number Value is the value to set. The range is -301 (disable) – 30000.

JUMP

N/A N/A Recipe Number

The JUMP opcode is used to go to another program when no return is needed. The difference between a JUMP and a GOSUB is that GOSUB will return to the original program when the called program completes. A JUMP will not return to the original program.

The Recipe Number is the recipe number to go to. The range is 1 – 300.

LIMIT

N/A N/A Time Limit

This Opcode is used to place a time limit on a wait or inquiry step. This opcode should be placed in the step immediately following the Wait or Inquiry step. Once the recipe reaches the Wait or Inquiry step, a timer initiates. Should the timer run out before the wait or inquiry is satisfied, an alarm occurs. If the timer expires, text will appear on the touch screen indicating “Limit Alarm”.

While the alarm is active, a Programmer Alarm can be assigned to a specific relay (see sections on Relay Assignments) to enunciate an alarm horn or stack light.

The Time Limit is the total time, in Hours:Minutes format, for the program to wait. The Hours range from 0 – 8, and the Minutes range from 0 – 59.

Both the text and alarm remains active until the program ends.

LOW_AL

Temperature Setpoint N/A N/A

This opcode is used to enable a low limit alarm should the Control TC exceed a defined temperature minimum. This Opcode can be placed at any location within the recipe and remains active until the program ends If the Control TC drops below this temperature, text will appear on the touch screen indicating “Low Temperature”.

While the alarm is active, a Programmer Alarm can be assigned to a specific relay (see sections on Relay Assignments) to enunciate an alarm horn or stack light.

The Temperature Setpoint is the setpoint to send for the temperature process variable. The range is -301 (disable) – 30000.

Both the text and alarm remains active until the program ends.

LOW_PO

Temperature PO Value N/A N/A

This opcode is used to enable a low limit alarm should the temperature percent output drop below a defined minimum. This Opcode can be placed at any location within the recipe and remains active until the program ends. If the Temperature Percent Output drops below this value, text will appear on the touch screen indicating “Low Temperature % Output”.

While the alarm is active, a Programmer Alarm can be assigned to a specific relay (see sections on Relay Assignments) to enunciate an alarm horn or stack light.

The Temperature PO Value is the high limit point for the temperature percent output. The range is -101 (disable) – 100.

Both the text and alarm remains active until the program ends.

LTC_SET

T/C Map T/C Map Load TC Enable

This opcode sets the active load T/C map for the furnace. Checking the box next to the T/C number selects the T/C. The options are off, on, or on + alarms.

This Opcode is the same as Zone/Load TC Setup via the Menu options (see sections on Zone/Load TC Setup) except that it selects thermocouples from the recipe. This may be helpful when certain recipes require three Load TCs and other require six Load TCs.

NOTE: Only TCs selected in the Load TC Map will be available here. See the Configuration section for more details.

LTCMINCNT

N/A N/A Number

This opcode sets the active load T/C minimum number. The options are 0 (disable) – 49.

MEVT_IN_0

Temperature Setpoint Event Mask Event ON/OFF Bitmap

This opcode waits for multiple input events 0 through 15.

The Temperature Setpoint is an optional setpoint to send down. The range is -301 (disable) – 30000.

The Event Mask is the events to enable, which is the events affected. The options are: 0 – 15. Selecting (via a checkmark) enables the respective event. The user can then define if the selected events should be on or off via the Event On/Off Bitmap.

The Event ON/OFF Bitmap field will allow the user to select the bitmap for the event ON/OFF, which will set the final condition of the events in the event mask. The opcode ignores the bits not in the enabled events and waits on the bits specified in the bitmap. The options are: 0 – 15. Selecting (via a checkmark) waits for the respective Input to be ON. Not selecting waits for the respective Input to be OFF.

MEVT_IN_1

Temperature Setpoint Event Mask Event ON/OFF Bitmap

This opcode waits for multiple input events 16 through 31.

The Temperature Setpoint is an optional setpoint to send down. The range is -301 (disable) – 30000.

The Event Mask is the events to enable, which is the events affected. The options are: 0 – 15. Note – Even though the events listed are 0 – 15, they correspond to 16 – 31. Selecting (via a checkmark) enables the respective event. The user can then define if the selected events should be on or off via the Event On/Off Bitmap.

The Event ON/OFF Bitmap field will allow the user to select the bitmap for the event ON/OFF, which will set the final condition of the events in the event mask. The opcode ignores the bits not in the enabled events and waits on the bits specified in the bitmap. The options are: 0 – 15. Note – Even though the events listed are 0 – 15, they correspond to 16 – 31. Selecting (via a checkmark) waits for the respective Input to be ON. Not selecting waits for the respective Input to be OFF.

MEVT_OUT_0

Temperature Setpoint Event Mask Event ON/OFF Bitmap

This opcode will set multiple output events 0 through 15.

The Temperature Setpoint is an optional setpoint to send down. The range is -301 (disable) – 30000.

The Event ON/OFF Bitmap field will set the final condition of the events in the event mask. The opcode will ignore the bits not in the mask and either set or reset the bits depending upon their states in the bitmap. The options are: 0 – 15. Selecting (via a checkmark) waits for the respective Input to be ON. Not selecting waits for the respective Input to be OFF.

MEVT_OUT_1

Temperature Setpoint Event Mask Event ON/OFF Bitmap

This opcode will set multiple output events 16 through 31.

The Temperature Setpoint is an optional setpoint to send down. The range is -301 (disable) – 30000.

The Event ON/OFF Bitmap field will set the final condition of the events in the event mask. The opcode will ignore the bits not in the mask and either set or reset the bits depending upon their states in the bitmap. The options are: 0 – 15. Note – Even though the events listed are 0 – 15, they correspond to 16 – 31. Selecting (via a checkmark) waits for the respective Input to be ON. Not selecting waits for the respective Input to be OFF.

MEVT_OUT_2

Temperature Setpoint Event Mask Event ON/OFF Bitmap

This opcode will set multiple output events 32 through 47.

The Temperature Setpoint is an optional setpoint to send down. The range is -301 (disable) – 30000.

The Event Mask is the events to enable, which is the events affected. The options are: 0 – 15. Note – Even though the events listed are 0 – 15, they correspond to 32 – 47. Selecting (via a checkmark) enables the respective event. The user can then define if the selected events should be on or off via the Event On/Off Bitmap.

The Event ON/OFF Bitmap field will set the final condition of the events in the event mask. The opcode will ignore the bits not in the mask and either set or reset the bits depending upon their states in the bitmap. The options are: 0 – 15. Note – Even though the events listed are 0 – 15, they correspond to 32 – 47. Selecting (via a checkmark) waits for the respective Input to be ON. Not selecting waits for the respective Input to be OFF.

NO-OP

N/A N/A N/A

This is a no operation code, and it does nothing. It is used as a place holder on programs that are less than 24 steps.

OG_holdt

N/A Torr Level Option

This opcode will monitor the vacuum level a setpoint to keep the vacuum level under a certain point. When the actual vacuum level is at or above the setpoint, the recipe will be put in a hold. This Opcode can be placed at any location within the recipe and remains active until (1) another gauge is selected, (2) the Level Option of OFF is selected or (3) the program ends. When the vacuum falls below the setpoint, the hold will be removed.

The gauge can be changed during a cycle or turned off completely but the programmer can only monitor one vacuum gauge at a time.

Torr Level is the vacuum setpoint in Torr.

OGholdm

N/A Micron Level Option

The gauge can be changed during a cycle or turned off completely but the programmer can only monitor one vacuum gauge at a time.

Micron Level is the vacuum setpoint in Micron.

PIDLOAD

Loop 2 Loop 1 N/A

This opcode will load an alternate PID set from the controller memory (note: Loop 2 is not available in 9220 controller; this, should not be used). Loop 1 should be used as the Temperature Loop.

The Loop 1 field is the alternate PID loop to use for loop 1. A value of 0 will disable the loop PID. The range is 0 – 16.

The Loop 2 field is the alternate PID loop to use for loop 2. A value of 0 will disable the loop PID. The range is 0 – 16.

The alternate PID loops can be set up on the Alternate PID Setup screen. See the Alternate PID Setup section for more information.

NOTE: The feature of PID Auto Switch is disabled for the entire duration of a recipe when the opcode PIDLOAD is executed. See the PID Loop Setup section for more information.

PLC_SET_VAL

Value Write Location Option

This opcode will set specially configured values in a Client PLC. Registers to be written to must be described via the Configurator’s Recipe Management Group Opcode Control interface. The temperature data is the value to write. The atmosphere data is the Write location. This can be:

Quench SP

Endo SP

Ammonia SP

N2 SP

Methanol SP

Quench Sec

Drain Sec

T.C. Endo SP

T.C. N2 SP

FNC NH3 SP

T.C. Time

PLC Quench SP

Quench Type

The options are: Wait, Wait up, or Wait Down.

PO_INQ

Temperature PO Value N/A Option

The percent output inquiry is used to test the actual percent output of the temperature controller.

The Temperature PO Value is the temperature percent output to test against. The range is -101 (disable) – 100.

The Option value will determine how the test will conclude. The options are: Wait (Equals the specified value), Wait Up (Reach or Exceed the specified values), or Wait Down (Reach or Be Less than the specified values).

The LIMIT opcode immediately following this opcode sets a time limit on the wait.

A BRANCH opcode immediately following this opcode can be used to change the program flow based on the inquiry results.

QTCSET

Temperature Setpoint N/A N/A

This is the quench setpoint opcode. This will allow the user to set the setpoint for a quench cycle.

The Temperature Setpoint is the setpoint to send down. The temperature setpoint is not sent down if the internal 9220 quench timer is timing. It will wait for the quench timer to time out before sending. This allows the opcode to be put at the beginning of a recipe and not affect the quench temperature set point of a load already quenching.

A Quench Instrument must be defined in Furnace Setup for this to properly work properly.

The range is -301 (disable) – 30000.

QUENCH

Temperature Time Speed

This opcode is used to start a quench cycle. The quench cycle is independent of any program that is running. A new recipe can be started while the quench timer is active.

The Temperature is the quench temperature controller set point. The quench temperature controller must be defined as a Client instrument in the Client Instrument Setup menu and configured in the Furnace Setup menu as Instrument # 4. The range is -301 (disable) – 30000.

The quench cycle starts when the opcode is executed. The set point is sent to the quench temperature controller, the timer is started, and the high-speed event is turned on if it is selected. Once the quench timer has timed out, the quench speed changes to an idle speed, and the end of quench cycle event pulses on and off.

The Time is the quench time in minutes. The range is -1 (disable) – 9999.

The Speed is used to trigger an Event (#6, by default, which can be changed in the Furnace Setup menu).

While this quench cycle is active, there are three events that can be triggered:

Quench speed event (Default: #6)
Quench run event (Default: #0)
End of quench event (Default: #7)

All of these events must be configured in the Furnace Setup menu.

Quench Speed Event

While the quench timer is active, if a high speed was selected, the quench speed event will be on. This Event can control the agitator speed, high or low. This Event will remain off if the quench speed is set to low.

Quench Run Event

While the quench timer is active, the Quench Run Event is on.

End of Quench Event

When the End of Quench Alarm is activated at the end of the quench cycle, the user must acknowledge the alarm. While the End of Quench Alarm is active, the End of Quench Event will be on.

Refer to Furnace Setup for proper use of Events with respect to Quench Event setup.

RAMP

Temperature Setpoint N/A Time

This opcode changes the temperature set point linearly over time.

The Temperature Setpoint is the setpoint to send for the temperature process variable. The range is -301 (disable) – 30000.

The Time is the total time for the program to reach the desired setpoint(s), in Hours:Minutes format. The Hours range from 0 – 166, and the Minutes range from 0 – 59.

The band limit can be changed by the SET_WAIT opcode.

RAMPR

Temperature Setpoint Option Decimal Rate

This opcode changes the temperature set point at a rate of degrees per minute.

The Temperature Setpoint is the setpoint to send for the temperature process variable. The range is -301 (disable) – 30000.

The Option Decimal will alter the decimal point in the rate. The range is -1 (disable) – 2.

The Rate will be the rate of degrees per minute to change the temperature until the setpoint is reached. The range is 0.01 – 300.00.

RESET

Recipe Number Recipe Step N/A

This opcode is used to clear all stacks and timers and start a program. The RESET is useful in a weekend shut down program to restart the normal operating program.

The Recipe Number is the program number to start once everything has been reset. The range is 1 – 300.

The Recipe Step is the step number in the program to start at. The range is 1 – 24.

RLY_INQ

Off step number On step number Option

The relay inquiry is used to check the relays using the relay setpoint RLY_SP_M or RLY_SP_T opcodes. This Opcode must immediately follow a Relay Setpoint Opcode.

The Off step number determines what the next recipe step will be when this Relay Setpoint is off. The On step number determines what the next recipe step will be when this Relay Setpoint is on.

The Option value will determine which vacuum relay is selected. If the relay is ON, the program moves to the ON step number. If the relay is OFF, the program moves to the OFF step number.

The LIMIT opcode immediately following this opcode sets a time limit on the wait.

A BRANCH opcode immediately following this opcode can be used to change the program flow based on

the inquiry results.

RLY_SP_M

Off setpoint On setpoint Option

This opcode determines the relay setpoint in microns to be used in conjunction with the RLY_INQ Opcode and must precede the RLY_INQ.

The options are used to select the gauge and setpoint.

RLY_SP_T

Off setpoint On setpoint Option

This opcode determines the relay setpoint in Torr to be used in conjunction with the RLY_INQ Opcode and must precede the RLY_INQ.

The options are used to select the gauge and setpoint.

RUN_SLAVE

Recipe Number Recipe Step Client Instrument

This opcode will start a recipe on the specified Client SSI recipe programmer instrument.

The Recipe Number is the program number to start on the Client instrument. The range is 1 – 300.

The Recipe Step is the program step to start on in the Client instrument. The range is 1 – 24.

The Client Instrument is the Client instrument to select to start the recipe on (SSi recipe programmers only). The options are: 1 – 25.

SET_AUX

Setpoint Value N/A Client Instrument

This opcode sends a setpoint down to an auxiliary instrument.

The Setpoint Value is the setpoint to send down. The range is -301 (disable) – 30000.

The Client Instrument is the Client instrument to send the setpoint down to (SSi recipe programmers only). The options are: 1 – 25.

SET_PCL

Output Limit N/A Loop

This sets the PID change limit. It will limit the percentage output of the controller as the target temperature is reached.

Output Limit determines the percent per minute that the temperature can change.

Loop assigns the corresponding loop.

SET_WAIT

Temperature Setpoint N/A Speed

This opcode sets the band limits for the wait option or inquiry opcodes.

The Temperature Setpoint specifies the temperature band (i.e. +/- the value). The range is -301 (disable) – 30000.

The Speed is the speed to use. Upper and lower limits can be set together using Ctrl & Load, Ctrl, or Load; they can also be set independently using Ctrl & Load (+), Ctrl (+), Load (+), Ctrl & Load (-), Ctrl (-), or Load (-).

SETDAC

Output Level N/A Output

This opcode is used to set an analog output to the specified value. The output must be assigned as a Programmer DAC when SETDAC is called in a recipe. The Programmer DAC assignment is done in the Analog Output Setup menu on the 9220 touch screen or in Configurator. The Analog Output Setup menu contains Offset and Range settings, which will be proportionally applied to the 4-20mA output range.

The range for output level is -301 (disable) to 32767.

The range for output is 1 to 6.

SETOUTPT

Output Level N/A Output

This opcode is used to write a value to a configured analog output. The output is configured in the Relay Assignments menu (Programmer DAC 1 – 6). The Output Level is the output value that will be written to the analog output; the range is determined by the output range defined in the Analog Output Setup’s Range field for that output. The Output field defines which analog output (1 - 6) to send the value to.

SETPT

Temperature Setpoint N/A Option

This opcode is used to set the temperature set point.

The Temperature Setpoint is the setpoint to send for the temperature process variable. The range is -301 (disable) – 30000.

The Option will wait for the setpoints to be reached: Blank (Don’t Wait), Wait, Wait Up, or Wait Down. Note – The Blank option is an actual blank line, not the word “Blank”.

SOAK

N/A N/A Soak Time

This opcode is an unconditional soak for the time (in hours and minutes) specified. The programmer will hold for the time specified, and nothing except the operator pausing the recipe will put the program in a hold state.

The Soak time is the total time, in Hours:Minutes format, for the soak to run. The Hours range from 0 – 166, and the Minutes range from 0 – 59.

TC_CHK

Source 1 Source 2 Source 3

This opcode will check a TC.

Source 1 will determine the first source to check. The options are: Not Used, Instrument 1 – Instrument 25, and Input 1 – Input 3.

Source 2 will determine the second source to check. The options are: Not Used, Instrument 1 – Instrument 25, and Input 1 – Input 3.

Source 3 will determine the third source to check. The options are: Not Used, Instrument 1 – Instrument 25, and Input 1 – Input 3.

TC_INQ

Temperature Level T/C Option

The temperature inquiry is used to wait for the actual control temperature to reach the value specified.

The Temperature Level is the specified level to wait for. The range is -301 (disable) – 30000.

The T/C is the Control T/C or Load T/C to use. The options are: Control T/C, T/C 1 – T/C 24.

The Option is the wait options: Wait, Wait Up, or Wait Down.

The default band can be set under the Configuration Menu and is typically 15 degrees. The band limit can be changed by the SET_WAIT opcode.

The LIMIT opcode immediately following this opcode sets a time limit on the wait.

A BRANCH opcode immediately following this opcode can be used to change the program flow based on the inquiry results.

timeEvt

N/A Delay Time Option

This opcode will turn ON or OFF a specified event for the specified amount of time.

The Delay Time is the time in seconds. The range is: 0 – 500.

The Option is the event to turn ON or OFF. The options are: Event 0 ON or OFF – Event 47 ON or OFF.

TOD_INQ

N/A N/A Time

This opcode is a time of day inquiry that would be used to start a process or subroutine at a specific hour and minute. The time and date must be correct on the 9220 controller – the screen time and date will not be used.

The Time is the time to check, in Hours:Minutes format. The Hours range from 0 – 23, and the Minutes range from 0 – 59.

TZ_INQ

Temperature Level N/A Option

The zone temperature inquiry is used to wait for the actual control zone temperature to reach the value specified.

The Temperature Level is the specified level to wait for. The range is -301 (disable) – 30000.

The Option is the wait options: Wait, Wait Up, or Wait Down.

The default band can be set under the Configuration Menu and is typically 15 degrees. The band limit can be changed by the SET_WAIT opcode.

The LIMIT opcode immediately following this opcode sets a time limit on the wait. A BRANCH opcode immediately following this opcode can be used to change the program flow based on the inquiry results.

This opcode is identical to the TC_INQ opcode, except that it will deal with zones.

VAC_INQ_M_1-4

N/A Micron Level Option

The vacuum inquiry is used to determine the vacuum value of the gauge (1-4) being tested.

The Micron Level is the vacuum level in microns that the actual value will be compared to.

The Option value will determine how the test will conclude. The options are: Wait (Reach within band), Wait Up (Reach or Exceed the specified values), or Wait Down (Reach or Be Less than the specified values).

The LIMIT opcode immediately following this opcode sets a time limit on the wait.

A BRANCH opcode immediately following this opcode can be used to change the program flow based on the inquiry results.

VAC_INQ_T_1-4

N/A Torr Level Option

The vacuum inquiry is used to determine the vacuum value of the gauge (1-4) being tested.

The Torr Level is the vacuum level in Torr that the actual value will be compared to.

The LIMIT opcode immediately following this opcode sets a time limit on the wait.

A BRANCH opcode immediately following this opcode can be used to change the program flow based on the inquiry results.

VLUP_chk

Pass Step Number Retry Step Number Fail Step Number

A vacuum leak-up test will determine if the furnace is leaking at an acceptable low rate, as determined by the operator. This rate and other testing details can be assigned in the Vacuum Leak Up Testing menu on the touchscreen or Configurator.

The Pass Step Number determines the next step in the recipe if the furnace passes the test.

The Retry Step Number determines the next step in the recipe if the furnace fails the test but will retry.

The Fail Step Number determines the next step in the recipe if the furnace has retried the maximum number of times and still fails.

Note: This Opcode must appear after an EVT_OUT Opcode initiating the Leak Test (see Vacuum Leak up Event). It will define the branches directing the Recipe to appropriate Steps following evaluation of the Leak Test.

Note: This Opcode may not trigger closing of vacuum valves and other hardware on the furnace, that must be programmed or wired accordingly.

For example, in the following recipe step:

VLUP_chk 5 1 10

Following completion of a Leak Test, it will be evaluated as Pass, Fail or Retry based on the parameters defined with the Vacuum Leak Up Testing group.

If the furnace Leak Rate is less than that defined as the Max rate μ/hr, the Leak Test will Pass. The Recipe will proceed to step 5.

If the furnace Leak Rate is more than that defined as the Max rate μ/hr, the Leak Test will Fail. If it has failed fewer times than defined as the Number of Tests, the recipe will return to Step 1. If it has failed as many times as defined as the Number of Tests, the recipe will proceed to Step 10.

Example of Leak Test within a Recipe:

Step	Opcode	Par		Option
1	ALARM			1-Close Valves
2	EVT_OUT			5-ON, Initiate Leak Test
3	SOAK			0:15
4	VLUP_chk	5	1	10

Step 1 sets a Programmer Alarm, notifying the Operator they must manually close all vacuum valves evacuating the chamber.

Step 2 initiates the Leak Test, recording the initial Vacuum Level and starts an internal “Leak Test Timer”.

Step 3 allows the timer to count for 15 minutes.

Step 4 records the ending Vacuum Level and ends the internal “Leak Test Timer”. The change in Vacuum Level is compared to the duration of the timer, calculating a Leak Rate (in microns/hr). This value is compared to the parameters defined within Configurator, evaluating the test under Pass, Fail or Retry.

Z_SETPT

Temperature Setpoint N/A Option

This opcode is used to set the temperature set point for a zone.

The Temperature Setpoint is the setpoint to send for the temperature process variable. The range is -301 (disable) – 30000.

The Option will wait for the setpoints to be reached: Blank (Don’t Wait), Wait, Wait Up, or Wait Down. Note – The Blank option is an actual blank line, not the word “Blank”.

ZONE_OFF

Temperature Value N/A Zone

The Zone Offset opcode is used to set a temperature offset to be added to the set point sent to a specific zone. The same loop (furnace) can have different offsets for each zone. The zones must be defined in the zone configuration.

For example, a pit furnace has three zones: top, middle, and bottom.

The zones could be defined as:

top = zone 1
middle = zone 2
bottom = zone 3

If the ZONE_OFF opcode is used in a program with Temperature Value = 50 and Zone = 1 and a setpoint of 1700, then:

A set point of 1750 would be sent to the top zone (Zone 1)
A set point of 1700 would be sent to the middle zone (Zone 2)
A set point of 1700 would be sent to the bottom zone (Zone 3)

The offset from ZONE_OFF is discarded when the program ends. The default value is reloaded by the programmer when the user starts a new program.

The Temperature value is the offset value to send to the specified zone. The range is -301 (disable) – 30000.

The Zone is the specific zone to send the offsets to. The options are: Zone 1 – Zone 5.